Substrate support carrier with improved bond layer protection

ABSTRACT

A substrate support pedestal comprises an electrostatic chuck, a cooling base, a gas flow passage, a porous plug, and a sealing member. The electrostatic chuck comprises body having a cavity. The cooling base is coupled to the electrostatic chuck via a bond layer. The gas flow passage is formed between a top surface of the electrostatic chuck and a bottom surface of the cooling base. The gas flow passage further comprises the cavity. The porous plug is positioned within the cavity to control the flow of gas through the gas flow passage. The sealing member is positioned in a groove formed in the cooling base and configured to form a seal between the cooling base and one or both of the porous plug and the body of the electrostatic chuck.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. Non-Provisional ApplicationSer. No. 16/857,082, filed on Apr. 23, 2020, which claims benefit ofU.S. Provisional Patent Application 62/852,843, filed on May 24, 2019,each of which are herein incorporated by reference in its entirety.

BACKGROUND Field

The embodiments of the disclosure generally relate to a substratesupport pedestal having a protected bond layer for use in a substrateprocess chamber.

Description of the Related Art

Substrate support pedestals are widely used to support substrates withinsemiconductor processing systems during substrate processing. Thesubstrate support pedestals generally include an electrostatic chuckbonded to a cooling base with a bond layer. An electrostatic chuckgenerally includes one or more embedded electrodes which are driven toan electrical potential to hold a substrate against the electrostaticchuck during processing. The cooling base typically includes one or morecooling channels and aids in controlling the temperature of thesubstrate during processing. Further, the electrostatic chuck mayinclude one or more gas flow passages that allow a gas to flow betweenthe electrostatic chuck and the substrate to assist in controlling thetemperature of the substrate during process. The gas fills the areabetween the electrostatic chuck and the substrate, enhancing the heattransfer rate between the substrate and the substrate support. However,when a substrate is not present, the gas flow passages also provide apath for the process gases to flow into the area between theelectrostatic chuck and the cooling base where the bond layer islocated. Consequently, the bond layer is eroded by the process gases.

The erosion of bond layer is problematic for at least two reasons.First, material eroded from bond layer is a process contaminant thatproduces defects and reduces product yields. Secondly, as the bond layeris eroded, the local rate heat transfer between the electrostatic chuckand cooling base changes, thereby creating undesirable temperaturenon-uniformities on the substrate and process drift.

Therefore, there is a need for an improved substrate support pedestal.

SUMMARY OF THE DISCLOSURE

In one example, a substrate support pedestal is provided that includesan electrostatic chuck, a cooling base, a gas flow passage, a porousplug, and a sealing member. The electrostatic chuck comprises bodyhaving a cavity. The cooling base is coupled to the electrostatic chuckvia a bond layer. The gas flow passage is formed between a top surfaceof the electrostatic chuck and a bottom surface of the cooling base. Thegas flow passage further comprises the cavity. The porous plug ispositioned within the cavity to control the flow of gas through the gasflow passage. The sealing member is positioned in a groove formed in thecooling base and configured to form a seal between the cooling base andone or both of the porous plug and the body of the electrostatic chuck

In one example, an electrostatic chuck has a body comprising a topsurface, a cavity, a gas flow passage, and a porous plug. The gas flowpassage is formed between the top surface and the cavity. The porousplug is positioned within the cavity. A sealing member is positionedadjacent to the porous plug and is configured to form one or more of aradial seal between the porous plug and the cavity and an axial sealbetween the porous plug and a cooling base bonded to the electrostaticchuck.

In one example, a substrate support pedestal is provided that includesan electrostatic chuck, a cooling base, a gas flow passage, a porousplug, and a sealing member. The electrostatic chuck having a bodycomprising a cavity. The cooling base is coupled to the electrostaticchuck via a bond layer. The gas flow passage is formed between a topsurface of the electrostatic chuck and a bottom surface of the coolingbase. The gas flow passage further includes the cavity. The porous plugis positioned within the cavity. The sealing member is positionedadjacent to the porous plug and is configured to form one or more of aradial seal between the porous plug and the cavity and an axial sealbetween the porous plug and the cooling base.

In one example, a process chamber comprises a chamber body, anelectrostatic chuck, a cooling base, a gas flow passage, a porous plugand a sealing member. The chamber body has a processing volume. Theelectrostatic chuck is disposed in the processing volume and has a topsurface configured to support a substrate during processing. Theelectrostatic chuck further comprises a bottom surface and a cavity. Thecooling base is coupled to the electrostatic chuck via a bond layer. Thegas flow passage is formed between the top surface of the electrostaticchuck and a bottom surface of the cooling base. Further, the gas flowpassage passes through the cavity. The porous plug is positioned withinthe cavity. The sealing member is positioned adjacent to the porous plugand is configured to form one or more of a radial seal between theporous plug and the cavity and an axial seal between the porous plug andthe cooling base.

BRIEF DESCRIPTION OF DRAWINGS

So that the manner in which the above recited features of the presentdisclosure are attained and can be understood in detail, a moreparticular description of the disclosure, briefly summarized above, maybe had by reference to the embodiments thereof which are illustrated inthe appended drawings. It is to be noted, however, that the appendeddrawings illustrate only embodiments of this disclosure and aretherefore not to be considered limiting of its scope, for the disclosuremay admit to other equally effective embodiments.

FIG. 1 depicts a schematic of a process chamber having a substratesupport pedestal, according to one or more embodiments.

FIG. 2 depicts a partial sectional view of the substrate supportpedestal, according to one or more embodiments.

FIGS. 3, 4, 5, 6, 7, 8 and 9 are partial sectional views of thesubstrate support pedestal, according to one or more embodiments.

To facilitate understanding, identical reference numerals have beenused, wherever possible, to designate identical elements that are commonto the figures.

DETAILED DESCRIPTION

The systems and methods discussed herein employ substrate supportpedestals that have a cooling base and electrostatic chuck bondedtogether via a bond layer. A porous plug is positioned in a gas flowpassage formed in the cooling base and the electrostatic chuck. Therestriction of the porous plug protects the bond layer from the processgases utilized during substrate processing. Advantageously, thefollowing embodiments discuss improved techniques for securing theporous plug within the gas flow passage to prevent degradation of thebond layer through the utilization of a radial seal that substantiallyprevents gas flowing around the porous plug.

FIG. 1 depicts a schematic diagram of a process chamber 100, accordingto one or more embodiments. The process chamber 100 includes at least aninductive coil antenna segment 112A and a conductive coil antennasegment 112B, both positioned exterior to a dielectric, ceiling 120. Theinductive coil antenna segment 112A and the conductive coil antennasegment 1128 are each coupled to a radio-frequency (RF) source 118 thatproduces an RF signal. The RF source 118 is coupled to the inductivecoil antenna segment 112A and to the conductive coil antenna segment1128 through a matching network 119. Process chamber 100 also includes asubstrate support pedestal 116 that is coupled to an RF source 122 thatproduces an RF signal. The RF source 122 is coupled to the substratesupport pedestal 116 through a matching network 124. The process chamber100 also includes a chamber wall 130 that is conductive and connected toan electrical ground 134.

A controller 140 comprising a central processing unit (CPU) 144, amemory 142, and support circuits 146. The controller 140 is coupled tothe various components of the process chamber 100 to facilitate controlof the substrate processing process.

In operation, the semiconductor substrate 114 is placed on the substratesupport pedestal 116 and gaseous components are supplied from a gaspanel 138 to the process chamber 100 through entry ports 126 to form agaseous mixture in a processing volume 150 of the process chamber 100.The gaseous mixture in the processing volume 150 is ignited into aplasma in the process chamber 100 by applying RF power from the RFsources 118, 122 respectively to the inductive coil antenna segment112A, the conductive coil antenna segment 1128 and to the substratesupport pedestal 116. Additionally, chemically reactive ions arereleased from the plasma and strike the substrate; thereby removingexposed material from the substrate's surface.

The pressure within the interior of the process chamber 100 iscontrolled using a throttle valve 127 situated between the processchamber 100 and a vacuum pump 136. The temperature at the surface of thechamber walls 130 is controlled using liquid-containing conduits (notshown) that are located in the chamber walls 130 of the process chamber100.

The substrate support pedestal 116 comprises an electrostatic chuck 102disposed on a cooling base 104. The substrate support pedestal 116 isgenerally supported above the bottom of the process chamber 100 by ashaft 107 coupled to the cooling base 104. The substrate supportpedestal 116 is fastened to the shaft 107 such that the substratesupport pedestal 116 can be removed from the shaft 107, refurbished, andre-fastened to the shaft 107. The shaft 107 is sealed to the coolingbase 104 to isolate various conduits and electrical leads disposedtherein from the process environment within the process chamber 100.Alternatively, the electrostatic chuck 102 and cooling base 104 may bedisposed on an insulating plate that is attached to a ground plate orchassis. Further, the ground plate may be attached to one or more of thechamber walls 130.

The temperature of the semiconductor substrate 114 is controlled bystabilizing the temperature of the electrostatic chuck 102. For example,a backside gas (e.g., helium or other gas) may be provided by a gassource 148 to a plenum defined between the semiconductor substrate 114and a support surface 106 of the electrostatic chuck 102. The backsidegas is used to facilitate heat transfer between the semiconductorsubstrate 114 and the substrate support pedestal 116 to control thetemperature of the substrate 114 during processing. The electrostaticchuck 102 may include one or more heaters. For example, the heaters maybe electrical heaters or the like.

FIG. 2 depicts a vertical cross-sectional view of a portion of thesubstrate support pedestal 116 depicted in FIG. 1 , according to one ormore embodiments. As is discussed above the substrate support pedestal116 has the cooling base 104 secured to the electrostatic chuck 102. Inthe example depicted in FIG. 2 , the cooling base 104 is secured to theelectrostatic chuck 102 by a bond layer 204.

The bond layer 204 comprises one or more materials such as an acrylic orsilicon-based adhesive, epoxy, neoprene based adhesive, an opticallyclear adhesive such as a clear acrylic adhesive, or other suitableadhesive materials.

The cooling base 104 is generally fabricated from a metallic materialsuch as stainless steel, aluminum, aluminum alloys, among other suitablematerials. Further, the cooling base 104 includes one or more coolingchannels 212 disposed therein that circulate a heat transfer fluid tomaintain thermal control of the substrate support pedestal 116 and thesubstrate 114.

The electrostatic chuck 102 is generally circular in form but mayalternatively comprise other geometries to accommodate non-circularsubstrates. For example, the electrostatic chuck 102 may comprise asquare or rectangular substrate when used in processing display glass,such as such as glass for flat panels displays. The electrostatic chuck102 generally includes a body 206 including one or more electrodes 208.The electrodes 208 are comprised of an electrically conductive materialsuch as copper, graphite, tungsten, molybdenum and the like. Variousembodiments of electrode structures include, but are not limited to, apair of coplanar D-shaped electrodes, coplanar interdigital electrodes,a plurality of coaxial annular electrodes, a singular, circularelectrode or other structure. The electrodes 208 are coupled to a powersupply 125 by a feed through 209 disposed in the substrate supportpedestal 116. The power supply 125 may drive the electrode 208 with apositive or negative voltage. For example, the power supply 125 maydrive the electrode 208 with a voltage of about −1000 volts or a voltageof about 2500 volts. Alternatively, other negative voltages or otherpositive voltages may be utilized.

The body 206 of the electrostatic chuck 102 may be fabricated from aceramic material. For example, the body 206 of the electrostatic chuck102 may be fabricated from a low resistivity ceramic material (i.e., amaterial having a resistivity between about 1×E⁹ to about 1×E¹¹ ohm-cm).Examples of low resistivity materials include doped ceramics such asalumina doped with titanium oxide or chromium oxide, doped aluminumoxide, doped boron-nitride and the like. Other materials of comparableresistivity, for example, aluminum nitride, may also be used. Suchceramic materials having relatively low resistivity generally promote aJohnsen-Rahbek attractive force between the substrate and electrostaticchuck 102 when power is applied to the electrodes 208. Alternatively, abody 206 comprising ceramic materials having a resistivity equal to orgreater than 1Ex¹¹ ohms-cm may also be used. Further, the body 206 ofthe electrostatic chuck 102 may be fabricated from an aluminum oxide.

The support surface 106 of the body 206 includes a plurality of mesas216 disposed inwards of a seal ring (not shown) formed on the supportsurface 106. The seal ring is comprised of the same material comprisingthe body 206 but may alternatively be comprised of other dielectricmaterials. The mesas 216 are generally formed from one or more layers ofan electrically insulating material having a dielectric constant in therange of about 5 to about 10. Examples of such insulating materialsinclude, but are not limited to, silicon nitride, silicon dioxide,aluminum oxide, tantalum pentoxide, polyimide and the like.Alternatively, the mesas 216 may be formed from the same material as thebody 206 and then coated with a high resistivity dielectric film.

During operation, an electrical field generated by driving theelectrodes 208 holds the substrate 114 on the support surface 106 with aclamping force. The clamping force is greatest at each mesa 216.Further, the mesas 216 may be positioned and/or sized to achieve auniform charge distribution across the backside of the substrate.

A backside gas (e.g., helium, nitrogen or argon) is introduced to aplenum 280 by the gas source 148 to aid in the control the temperatureacross the substrate 114 when it is retained by the electrostatic chuck102. The plenum 280 is defined between the support surface 106 of theelectrostatic chuck 102 and the substrate 114. Further, the backside gaswithin the plenum 280 provides a heat transfer medium between theelectrostatic chuck 102 and the substrate 114. The backside gas isgenerally provided to the plenum 280 through one or more gas flowpassages 270 formed through the body 206 and the cooling base 104.Further, each gas flow passage 270 terminates at a corresponding opening210 formed through the support surface 106 of the body 206.

The gas flow passage 270 extends from the support surface 106 of thebody 206 to a bottom surface 284 of the cooling base 104. The gas flowpassage 270 includes the opening 210 in the electrostatic chuck 102, anopening 209 in the cooling base 104, and a cavity 211 formed in the body206 of the electrostatic chuck 102. The cavity 211 may have a sectionalarea, such as a diameter, that is greater than a sectional area of atleast one of the opening 210 and the opening 209. The opening 209 mayhave a diameter that is greater than, less than or equal to the diameterof the opening 210. Further, while a single gas flow passage 270 isillustrated in FIG. 2 , the substrate support pedestal 116 may includemultiple gas flow passages.

The gas flow passage 270 is coupled to the gas source 148. Additionally,each of gas flow passage 270 may be coupled to the gas source 148through a single port 272. Alternatively, each gas flow passage 270 maybe individually coupled to the gas source 148 through separate ports272.

A porous plug 244 is generally disposed within the gas flow passage 270(within the cavity 211) such that it forms a part of the gas flowpassage 270. The porous plug 244 provides a path for pressurized gas toflow between two surfaces of different electrical potential. Forexample, the porous plug 244 provides a path for pressurized gas to flowbetween a first and second surface of the electrostatic chuck 102, andbetween a first surface of the electrostatic chuck 102 and a firstsurface of the cooling base 104. Further, the porous plug 244 comprisesa plurality of small passage ways which reduce the probability thatplasma will ignite in the gap 204A between the electrostatic chuck 102and the cooling base 104 as compared to a design not including theporous plug 244. The porous plug 244 is generally comprised of a ceramicmaterial such as aluminum oxide or aluminum nitride. Alternatively, theporous plug 244 may be comprised of other porous materials. Further, theporous plug 244 may have a porosity of about 30 to about 80 percent.Alternatively, the porous plug may have a porosity of less than 30percent or greater than 80 percent. Additionally, the porous plug 244abuts a step 250 that defines the top of the cavity 211.

The porous plug 244 has a t-shape. A t-shaped porous plug providesincreased gas flow as compared to porous plugs of other shapes and iseasier to install into the cavity 211 than porous plugs of other shapes.The porous plug 244 may include a head 251 and a shaft 252. The head 251has a diameter 253 and the shaft 252 has a diameter 254. Further, thediameter 253 is larger than the diameter 254. Additionally, the headincludes bottom surface 255 which meets the shaft 252. The head 251further includes surface 256 facing the sidewall 205 of the cavity 211.Further, the shaft 252 includes a surface 257 facing the sidewall 205 ofthe cavity 211. In various embodiments, the porous plug 244 may bepositioned within the cavity 211 using various techniques such as pressfitting, slip fitting, clearance fitting, pinning, and bonding, amongothers. For example, the porous plug 244 may be positioned within thecavity such that the surface 256 of the head 251 is in contact with thesidewall 205 or such that there is a gap between the surface 256 of thehead 251 and the sidewall 205.

The sealing member 245 is disposed adjacent to the porous plug 244. Thesealing member 245 forms a seal between the surface 257 of the porousplug 244 and the sidewall 205 of the cavity 211. The sealing member 245may form at least one of a radial seal between the porous plug 244 andthe cavity 211 and an axial seal between the porous plug 244 and thecooling base 104. Further, the sealing member 245 may secure the porousplug 244 within the cavity 211. For example, the sealing member 245 maybe coupled to at least one of the porous plug 244 and the sidewall 205of the cavity 211 using various techniques, such as press fitting,pinning, and bonding, among others. The sealing member 245 maymechanically secure the porous plug 244 to the sidewall 205 of thecavity 211.

The sealing member 245 may be comprised of a resilient polymericmaterial, such as an elastomer. Further, the sealing member 245 may becomprised of one or more of a fluoroelastomer material (e.g., a FKM), aperfluoroelastomer material (e.g., a FFKM), and a highly purity ceramic.The highly purity ceramic may be greater than 99% pure and may be aceramic paste or a solid suspended in solution. Further, the sealingmember 245 may be comprised of a material that is erosion resistive tothe process gases. For example, erosion resistive materials do not erodein the presence of process gases. Additionally, or alternatively, thematerial of the sealing member 245 is selected such that the materialdoes not penetrate the porous plug 244. The sealing member 245 may be anO-ring, a cylindrical gasket, or other ring-shaped seal. Alternatively,the sealing member 245 may be formed from a material that is applied inone of a liquid, paste and/or gel and changes state to a substantiallysolid or gel form. Further, the sealing member 245 may be comprised of asubstantially non-adhesive material.

The bond layer 204 secures the body 206 to the cooling base 104.Further, a gap 204A is formed in the bond layer 204 and is part of thegas flow passage 270. As the material or materials that typically makeup the bond layer 204 are susceptible to erosion in the presence of theprocess gases used during substrate processing, various methods forprotecting the bond layer 204 from the process gases have been explored.Advantageously, by employing a sealing member, e.g., the sealing member245, which is highly erosion resistive to the process gases, the processgas passing through the porous plug 244 may be prevented. Thus, the lifeof the bond layer 204 is increased. Additionally, the useful servicelife of the substrate support pedestal 116 is increased.

FIG. 3 is a schematic cross-section of a portion 201 of the substratesupport pedestal 116, according to one or more embodiments. As isdescribed above, the porous plug 244 has the head 251 and the shaft 252,forming the t-shape of the porous plug 244. A t-shaped porous plug mayprovide a better gas flow than porous plugs of other shapes and may beeasier to install into the cavity 211 than porous plugs of other shapes.Further, the porous plug 244 prevents the backside gas from flowing intothe gap between the electrostatic chuck 102 and the cooling base 104 andnegatively affecting (e.g., eroding) the bond layer 204.

The porous plug 244 may extend from a first end 302 of the cavity 211 toa second end 304 of the cavity 211. For example, the surface 306 of theporous plug 244 may contact the surface 309 of the cavity, and thesurface 308 of the porous plug 244 and the surface 307 of theelectrostatic chuck 102 may be coplanar, such that the surface 308 doesextend into the gap 305 between the electrostatic chuck 102 and thecooling base 104. Alternatively, the surface 308 may extend into the gap305 between the electrostatic chuck 102 and the cooling base 104.Further, the surface 308 may be between the surface 309 and the surface307.

As is stated above with regard to FIG. 2 , the porous plug 244 includesthe diameter 253 that is greater than the diameter 332 of the opening210. Further, the porous plug 244 and the opening 210 are concentric.Additionally, or alternatively, the porous plug 244 and the opening 209are concentric.

The cavity 211 includes a chamfered edge 310 formed where the sidewall205 meet the bottom surface 307 of the electrostatic chuck 102. Further,the porous plug 244 may have a chamfered edge where the surface 306meets the surface 256. The chamfered edge 310 of the cavity 211 and thechamfered edge 320 of the porous plug 244 aid in the insertion of theporous plug 244 into the cavity 211. Further, the chamfered edge 310reduces possible damage that may be caused to the sealing member 245when the sealing member 245 is inserted into the cavity around theporous plug 244, or the sealing member 245 expands during substrateprocessing.

The sealing member 245 is adjacent to the porous plug 244. The sealingmember 245 forms a radial seal between the porous plug 244 and thecavity 211. For example, the sealing member 245 may contact the surface257 of the porous plug 244 and the sidewall 205 of the cavity 211,preventing process gases from flowing along the sides of the porous plug244. Further, the sealing member 245 may secure the porous plug 244within the cavity 211. For example, the sealing member 245 may exert aforce on the sidewall 205 of the cavity 211 and the surface 257 of theporous plug 244 such that the porous plug 244 is held within the cavity211. Additionally, the sealing member 245 includes surfaces 356 and 357.One or more of the surfaces 356 and 357 may have a substantially curvedshape. The substantially curved shape may be convex or concave. Further,one or more of the surfaces 356 and 357 may have a substantially flatshape.

The sealing member 245 may completely reside within the cavity 211 orthe sealing member 245 may at least partially extend into the gap 305between electrostatic chuck 102 and the cooling base 104. Further, thesealing member 245 may be sized such that the sealing member 245 doesnot exceed the opening of the cavity 211 defined between the surface 255of the porous plug 244, the surface 257 of the shaft 252, the surface307 of the electrostatic chuck 102, and the sidewall 205 of the cavity211. Additionally, or alternatively, the bonding layer 204 may extendinto the gap 305 such that the bonding layer 204 at least partiallycontacts the sealing member 245.

FIG. 4 is a schematic cross-section of the portion 201 of the substratesupport pedestal 116, having a different sealing member 445. As comparedto the sealing member 245 of FIG. 3 , the sealing member 445 of FIG. 4forms a radial seal between the surface 257 of the shaft 252 thesidewall 205 of the cavity 211 and an axial seal between the surface 255of the porous plug 244 and a surface 404 of the cooling base 104. Forexample, the sealing member 245 may contact the surface 257 and thesurface 255 of the porous plug 244, the sidewall 205 of the cavity 211and the surface 404 of the cooling base 104. The sealing member 445 ispositioned adjacent to the porous plug 244. For example, the sealingmember 445 is positioned between the porous plug 244 and the sidewall ofthe cavity 211. Further, the sealing member is positioned between theporous plug 244 and the cooling base 104. Additionally, the sealingmember 445 may be formed similar to that of the sealing member 245. Forexample, the sealing member 445 may be an O-ring, a cylindrical gasket,or other ring-shaped seal. Further, the sealing member 245 may be formedfrom a material that is erosion resistive in the presence of the processgases used during substrate processing as are described above withregard to the sealing member 245. Additionally, the sealing member 445includes surfaces 456 and 457. One or more of the surfaces 456 and 457may have a substantially curved shape. The substantially curved shapemay be convex or concave. Further, one or more of the surfaces 456 and457 may have a substantially flat shape. Further, the bonding layer 204may at least partially contact the sealing member 445.

FIG. 5 is a schematic cross-section of the portion 201 of the substratesupport pedestal 116, having a different sealing member 545 and porousplug 544. The porous plug 544 is configured similar to that of theporous plug 244 of FIGS. 2 and 3 , however, the instead of comprising at-shape, the porous plug 544 comprises a cylindrical shape. The sealingmember 545 is positioned adjacent to the porous plug 544. For example,the sealing member 545 is positioned between the porous plug 544 and thesidewall of the cavity 211. Further, the sealing member may bepositioned between the surface 309 of the cavity 211 and the coolingbase 104. The porous plug 544 has diameter 530, top surface 506, bottomsurface 508 and surface 550. The top surface 506 contacts the surface309 of the cavity 211. Further, the surface 508 may be recessed withinthe cavity 211, coplanar with surface 307 of the electrostatic chuck102, or extend into the gap 305 formed between the surface 307 of theelectrostatic chuck and the surface 404 of the cooling base 104. Thediameter 530 of the porous plug 544 is greater than the diameter 532 ofthe opening 210.

The sealing member 545 may be formed similar to that of the sealingmember 245. For example, the sealing member 545 may be an O-ring, acylindrical gasket, or other ring-shaped seal. Further, the sealingmember 545 may be formed from a material that is erosion resistive inthe presence of the process gases used during substrate processing asare described above with regard to the sealing member 245. The sealingmember 545 forms a radial seal between the surface 550 of the porousplug 544 and the sidewall 205 of the cavity 211. For example, thesealing member 545 contacts the surface 550 of the porous plug 544 andthe sidewall 205 of the cavity 211, such as the sealing member 445illustrated in FIG. 4 . Additionally, the sealing member 545 may form anaxial seal between the surface 309 of the cavity 211 and the surface 404of the cooling base 104. For example, the sealing member 545 may contactthe surface 309 of the cavity 211 and contact the surface 404 of thecooling base 104. The sealing member 545 includes surfaces 556 and 557.One or more of the surfaces 556 and 557 may have a substantially curvedshape. The substantially curved shape may be convex or concave. One ormore of the surfaces 556 and 557 may have a substantially flat shape.Further, the bonding layer 204 may protrude into the gap 305 such thatthe bonding layer 204 at least partially contacts the sealing member545.

FIG. 6 is a schematic cross-section of the portion 201 of the substratesupport pedestal 116 having a different sealing member 645, according toone or more embodiments. As compared to the sealing member 245 of FIG. 3, the sealing member 645 of FIG. 6 is formed from a material applied ina liquid, paste or gel form, that changes state to a substantially solidor gel form. For example, the sealing member 645 may be formed from oneof a fluoroelastomer material, a perfluoroelastomer material, and a highpurity ceramic potting material, among others, that can be flowed orotherwise disposed in the cavity 211 around the porous plug 244 in aliquid or viscous state, which changes state to a more solid andsubstantially immobile form. The sealing member 645 is disposed adjacentto the porous plug 244 such that the material is disposed between thesurface 257 and the surface 255 of the porous plug 244 and the sidewall205 of the cavity 211. Further, the material may exposed to apredetermined pressure, temperature, and/or energy source to change thematerial to a substantially immobile form and generate the sealingmember 645. The temperatures used to change the material to asubstantially immobile file may be less than about 300 degrees Celsius.Alternatively, other temperatures may be utilized. Additionally, thesealing member 645 secures the porous plug 244 in the cavity 211,forming a radial seal between the surface 257 of the porous plug 244 andthe sidewall 205 the cavity 211. Further, the bonding layer 204 mayprotrude into the gap 305 such that the bonding layer 204 at leastpartially contacts the sealing member 645.

FIG. 7 is a schematic cross-section of the portion 201 of the substratesupport pedestal 116 having a different sealing member 745, according toone or more embodiments. As compared to the sealing member 545 of FIG. 5, the sealing member 745 of FIG. 7 is formed from a material applied ina liquid, paste or gel form, that changes state to a substantially solidor gel form. For example, the sealing member 745 may be formed from oneof a fluoroelastomer material, a perfluoroelastomer material, and a highpurity ceramic potting material, among others, that can be flowed orotherwise disposed in the cavity 211 around the porous plug 544 in aliquid or viscous state, which changes state to a more solid andsubstantially immobile form. The material may be disposed between thesurface 550 of the porous plug 544 and the sidewall 205 and the surface309 of the cavity 211. Further, the material is exposed to apredetermined pressure, temperature, and/or energy source to change thematerial to a substantially immobile form and generate the sealingmember 745. Additionally, the sealing member 745 contacts the surface550 of the porous plug 544 and the surface 309 and the sidewall 205 ofthe cavity 211, securing the porous plug 544 in the cavity 211. Further,the sealing member 745 forms a radial seal between the surface 550 ofthe porous plug 544 and the sidewall 205 the cavity 211. Further, thebonding layer 204 may protrude into the gap 305 such that the bondinglayer 204 at least partially contacts the sealing member 745.

FIG. 8 is a schematic cross-section of the portion 201 of the substratesupport pedestal 116, having a different porous plug 844 and a differentsealing member 845 as compared to the embodiment of FIG. 2 . Forexample, as compared to the porous plug 244 of FIG. 2 , the porous plug844 comprises a cylindrical shape. Further, as compared to the porousplug 544 of FIG. 5 , the diameter 830 of the porous plug 844 is greaterthan the diameter 530 of the porous plug 544 such that the porous plug844 fills more of the cavity 211 than porous plug 544. The diameter ofthe porous plug 844 is greater than the diameter 832 of the opening 210.The top surface 806 contacts the surface 309 of the cavity 211. Thesurface 808 may be coplanar with surface 307 of the electrostatic chuck102. The porous plug 844 may have a chamfered edge along the surface 806similar to that of the porous plug 244 of FIG. 3 .

The sealing member 845 may be formed similar to that of the sealingmember 245. For example, the sealing member 845 may be an O-ring, acylindrical gasket, or other ring-shaped seal. Further, the sealingmember 845 may be formed from a material that is erosion resistive inthe presence of the process gases used during substrate processing asare described above with regard to the sealing member 245. The sealingmember 845 forms an axial seal between the surface 808 of the porousplug 844, the surface 307 of the electrostatic chuck 102 and the surface809 of the cooling base 104. For example, the sealing member 845contacts the surface 809 of the porous plug 844 and the surface 307 ofthe electrostatic chuck 102. Further, the sealing member 845 contactsthe surface 809 of the cooling base 104.

The sealing member 845 is positioned adjacent to the porous plug 844.For example, the sealing member 845 is positioned between the porousplug 844 and the cooling base 104.

The cooling base 104 may include a groove 810. The surface 809 of thecooling base 104 forms the bottom of the groove 810. The sealing member845 is positioned in the groove 810 and between the cooling base 104 andthe electrostatic chuck 102. The groove 810 at least partially overlapsa portion of the cavity 211 and a portion of the electrostatic chuck102, thus allowing the groove 810 to effectively position the sealingmember 845 across and sealing the gap defined between the porous plug844 and the electrostatic chuck 102. As compared to embodiments that donot include the groove 810, the groove 810 allows for a largercross-section seal without increasing the thickness of the bond layer.Further, the groove 810 decreases the effects of manufacturingtolerances and allows for sealing over wider range of temperatures. Inone or more embodiments, the cooling base 104 does not include thegroove 810 and the sealing member 845 is in contact with the surface 809in an area overlapping with a portion of the electrostatic chuck 102 andthe cavity 211.

The sealing member 845 may secure the porous plug 844 within the cavity211. For example, the sealing member 845 may exert a force on thesurface 808 of the porous plug 844 and the surface 809 of the coolingbase 104 such that the porous plug 844 is held within the cavity 211.

The sealing member 845 includes surfaces 856 and 857. One or more of thesurfaces 856 and 857 may have a substantially curved shape. Thesubstantially curved shape may be convex or concave. Further, one ormore of the surfaces 856 and 857 may have a substantially flat shape.Further, the bonding layer 204 may at least partially contact thesealing member 845.

FIG. 9 is a schematic cross-section of the portion 201 of the substratesupport pedestal 116, having a porous plug 944 and a sealing member 845,according to one or more embodiments. The sealing member 845 isdescribed in greater detail with regard to FIG. 8 . As is described withregard to FIG. 8 , the cooling base 104 includes groove 810 at least aportion of the sealing member 845 is positioned with the groove 810.

As compared to the porous plug 844 of the embodiment of FIG. 8 , theporous plug 944 includes a surface 908 that extends into the gap 305between the electrostatic chuck 102 and the cooling base 104. Thediameter 931 of the portion of the porous plug 944 that extends into thegap 305 is less than the diameter 930 of the portion of the porous plug944 that is positioned within the cavity 211. The diameter 930 isgreater than the diameter 832 of the opening 210. Alternatively, thediameter 930 is less than or equal to the diameter 832. Further, the topsurface 906 of the porous plug 944 contacts the surface 309 of thecavity 211. The porous plug 944 may have a chamfered edge along thesurface 906 similar to that of the porous plug 244 of FIG. 3 .

The sealing member 845 is positioned adjacent to the porous plug 944.For example, the sealing member 845 is positioned between the porousplug 944 and the cooling base 104. The sealing member 845 contacts thesurface 307 of the electrostatic chuck 102, the surface 907 of theporous plug 944, and the surface 809 of the cooling base 104, forming anaxial seal between the electrostatic chuck 102 and the cooling base 104.The sealing member 845 may secure the porous plug 944 within the cavity211. For example, the sealing member 845 may exert a force on thesurface 907 of the porous plug 944 and the surface 809 of the coolingbase 104 such that the porous plug 944 is held within the cavity 211.Further, the sealing member 845 may contact the surface 909 of theporous plug 944.

The sealing members and porous plugs described herein are suitable foruse in substrate support pedestals for protecting the bond layer thatbonds the cooling base with the electrostatic chuck from the processgases. Advantageously, protecting the bond layer from the process gasesreduces erosion of the bond layer, and maintaining a substantiallyuniform temperature on a substrate. For example, sealing members thatare erosion resistive to the process gases may be utilized to form aradial seal and/or vertical seal between porous plugs of theelectrostatic chuck. Such sealing members prevent the flow of processgases into the gap between the electrostatic chuck and the cooling base,and reduce the erosion of the bond layer. Accordingly, a substantiallyuniform thermal transfer between the cooling base and the electrostaticchuck and a uniform temperature on the substrate is maintained.

While the foregoing is directed to embodiments described herein, otherand further embodiments may be devised without departing from the basicscope thereof, and the scope thereof is determined by the claims thatfollow.

What is claimed is:
 1. A substrate support pedestal comprising: anelectrostatic chuck having a body comprising a cavity; a cooling basecoupled to the electrostatic chuck via a bond layer, the cooling basehaving a groove; a gas flow passage formed between a top surface of theelectrostatic chuck and a bottom surface of the cooling base, the gasflow passage including the cavity and circumscribed by the groove; aporous plug disposed the cavity; and a sealing member disposed in thegroove and contacting a bottom surface of the porous plug, sealingmember configured to form a seal between the porous plug and a bottom ofthe groove.
 2. The substrate support pedestal of claim 1, wherein aportion of the porous plug extends inside an inner diameter of thesealing member.
 3. The substrate support pedestal of claim 1, whereinthe porous plug extends out of the cavity.
 4. The substrate supportpedestal of claim 1, wherein the sealing member contacts the body. 5.The substrate support pedestal of claim 1, wherein the sealing member isan O-ring or a cylindrical gasket.
 6. The substrate support pedestal ofclaim 1, wherein the sealing member is one of a fluoroelastomermaterial, perfluoroelastomer material, and a high purity ceramic.
 7. Thesubstrate support pedestal of claim 6, wherein the sealing member isformed from material applied in a liquid, paste or gel form.
 8. Thesubstrate support pedestal of claim 1, wherein the porous plug has oneof a t-shape and a cylindrical shape.
 9. A substrate support pedestalcomprising: an electrostatic chuck having a body comprising a cavity; acooling base coupled to the electrostatic chuck via a bond layer, thecooling base having a groove; a gas flow passage formed between a topsurface of the electrostatic chuck and a bottom surface of the coolingbase, the gas flow passage including the cavity and circumscribed by thegroove; a porous plug positioned within the cavity; and a sealing memberpositioned in the cavity and forming a seal between the body of theelectrostatic chuck and the cooling base.
 10. The substrate supportpedestal of claim 9, wherein a portion of the porous plug extends insidean inner diameter of the sealing member.
 11. The substrate supportpedestal of claim 9, wherein the porous plug extends out of the cavity.12. The substrate support pedestal of claim 9, wherein the sealingmember contacts the porous plug.
 13. The substrate support pedestal ofclaim 9, wherein the sealing member is an O-ring or a cylindricalgasket.
 14. The substrate support pedestal of claim 9, wherein thesealing member is one of a fluoroelastomer material, perfluoroelastomermaterial, and a high purity ceramic.
 15. The substrate support pedestalof claim 14, wherein the sealing member is formed from material appliedin a liquid, paste or gel form.
 16. The substrate support pedestal ofclaim 9, wherein the porous plug has one of a t-shape and a cylindricalshape.
 17. A process chamber comprising: a chamber body having aprocessing volume: an electrostatic chuck disposed in the processingvolume, the electrostatic chuck having a top surface configured tosupport a substrate during processing, a bottom surface, and a cavity; acooling base coupled to the electrostatic chuck via a bond layer, thecooling base having a groove; a gas flow passage formed between the topsurface of the electrostatic chuck and a bottom surface of the coolingbase, the gas flow passage passing through the cavity and circumscribedby the groove; a porous plug positioned within the cavity; and a sealingmember forming a seal between a bottom of the groove and the porous plugand the bottom surface of the electrostatic chuck.
 18. The processchamber of claim 17, wherein the porous plug extends out of the cavity.19. The process chamber of claim 17, wherein a portion of the porousplug extends inside an inner diameter of the sealing member.
 20. Theprocess chamber of claim 17, wherein the sealing member is one of afluoroelastomer material, perfluoroelastomer material, and a high purityceramic.